Silicon Valley Hub - In-Silicon Capabilities

Our In-Silicon Analysis Lab supports state-of-the-art techniques for debug and failure analysis, both electrically on our SVH test floor, as well as physically with our partner's analytical laboratory (located at walking distance from our Hub).



Inovys, Ocelot, Scan, Verigy SOM4000, SEMICAPS, OBIRCH SOM4000, SEMICAPS, OBIRCH


Electrical In-Silicon Analysis

Defects Equipment Capabilities
Transistors/Leakages
(static or transient) 		SOM-4000
InGaAs camera 		μA current detection
900-1700nm spectrum
Interconnects
(buried or intermittent) 		SOM-4000
1064/1340nm lasers 		< 0.75μm resolution (100x)
ATE direct docking
Timing characterization
Timing violation 		IDS 10k + OptiFIB 10ps resolution
10GHz bandwidth
Parametrics MicroManipulator P300 Up to 300mm wafers
Functional Marginalities IDS OptiFIB III 45nm, copper, low-k
Backside circuit edit


Physical Analysis

Technology Equipment Capabilities
FIB V-600, Altura 855 Cross-section, TEM prep, 8" wafers
TEM/STEM J-3010 0.17nm resolution @ 300kV
SEM NanoSEM 630 1.4nm resolution @ 1kV
XRT Comet 160.33 1μm spot size @ 160kV
C-SAM Hitachi 200 3D tomography