On our floor is a P300J motorized probe station from Micromanipulator.

With increased emphasis on advanced packaging engineering, an increasing number of projects rely on wafer-level characterization to accelerate product bring-up and initial validation.

Our probe station accomodates individual mechanical probing as well as probe-cards for parametric measurements and/or functional testing (linked to one of our ATEs).

The P300J probe station is a 300mm analytical probe station designed for low current, sub-micron positioning applications. It includes single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Motorized controls give a dynamic speed range which supports both precise positioning and long-distance moves. Both joystick and MicroTouchTM controls operate the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives.

Configuration

• 300mm wafers
• Temperature range: up to +300 degree
• Stage, Platen, Theta (300 x 300 x 50mm x 15 deg) range (0.1 micron resolution)
• Microscope 100 x 100mm (X-Y), x 200mm (Z) drive range (video available)
• Station joystick includes device select, high/low speed, and “lockout” buttons
• Stainless steel platen with 4-point platen leadscrew drive (supports both magnetic and vacuum base manipulators)
• Integrated dry/dark enclosure (EMF shield and enclosure for low temperature chuck dryness)
• High force chuck/theta post assembly (high pin count probe card pressures)