On our floor is a combination Photo Emission Microscope and Laser Scanning Microscope.

Its advanced optics is equipped with a range of objective lenses (from macro to 100x) mounted on a motorized turret.

Navigation is supported by Knights.

Laser Scanning Microscopy (LSM) is performed with two lasers: 1064nm and 1340nm. A wide variaty of applications is supported thanks to a very flexible scanning system.

Photoemission (PEM) is provided through an InGaAs camera, a best-of-date compromise between the relative limitation of traditional CDD units, and more complicated MCT cameras.

This system is inverted and can dock directly to any of the testers we have on our floor, in order to provide all the dynamic analysis capabilities offered by emission and lasers.

All PEM and LSM analysis are best performed from the backside of the device. All optics are infra-red capable.

Finally, the system is wafer capable, up to 300mm, and adapts to a mechanical probe station for wafer-level analytical applications.